薄膜晶体管液晶显示器件生产企业进口生产设备清单.docx

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1、薄膜晶体管液晶显示器件生产企业进口生产设备清单序号工序设备分类设备名称英文名称（供参考）1阵列成膜设备等离子增强化学气相淀积设备/化学气相沉积机/等离子加强气相沉积设备/化学气相成膜装置PECVD/CVD/P1asmaEnhancedChemica1VaporDeposition2常压化学气相淀积设备APCVD3溅射机（装置）/真空金属溅镀机/金属/金属氧化物/锢锡氧化物成膜装置Sputter/Meta1Sputter/ITOSputter/Meta1/IGZO/ITOSputterEquipment4离子注入机/离子植入机IonImpIantZImpIanter5特殊尾气处理装置/废气处理机

2、/CVD制程残气处理机/燃烧式尾气处理设备/无膜机CVD制程残气处理机GasTreatmentEquipmentzscrubberZCombustiontypewastegasabatementequipmetGasscrubbersystem6光刻系统涂胶显影机（装置）Track/CoaterDeve1operEquipment/Coater7涂胶机PreCoater/Coater8显影机Deve1oper显像液供给再生设备/显影液再生系统设备/显影液循环系统/显影液稀释再生管理装置Deve1operRecyc1eSystem/TMAH9deve1operdi1utionequipment/

3、TMAHdeve1operdi1utionrecyc1emanagementequipment10浓度管理设备（装置）/显影液浓度管理装置/现地供应系统Deve1operContro1System/Deve1operManagementEquipmentTemperatureContro1Unit/Before11玻璃温控机/曝光前基板温度安定装置/贴合前温度调节装置ExposureTemperatureContro1Unit/Pre-bondingTemperatureRegu1atingEquipment12紫外光固化装置/1线紫外线处理系统/紫外线曝光机UVCureEquipmentZI

4、UVsystem/1-UV曝光装置曝光机（一次/分步）/曝光机（装置）/阵列曝光机ExposureSystem/Scanner13Exposure/ExposureSystem(Equipment)/ArrayExposureZExposure14序号工序设备分类设备名称周边曝光&印字曝光机/打标机/边缘曝光机/边缘打码曝光系统/周边曝光机（装置）英文名称(供参考)Tit1er&EdgeExpo./Tit1er/EdgeeposureArrayTi1terwithEdgeExposureZEdgeexposure/EXPOSURE-EDGE(equipment)/EdgeExposureEqu

5、ipment15软X射线静电消除器/X射线静电消除器Photo1onizer/1onizer16刻蚀/去胶设备湿法刻蚀机（装置）/阵列湿法刻蚀机/化学湿法蚀刻机WetEtcher(Equipment)/ArrayWetEtcherr17干刻蚀机（装置）（CDERIEPE）/干刻灰化机DryEtcher/DryAsher台/干法刻蚀机18阵列刻蚀/去胶设备EPD终点探测系统/EPD终点探测机（设备）/终点检测仪EPDSystem19剥离装置/剥离机/湿式剥离机StripperZWetStripper/ResistStripperEquipment2021退火设备类退火炉/快速退火炉/烘干炉/烧结

6、炉装置退火处理机/快速退火处理机Annea1M/C/OvenequipmetAea1ovenD1Annea1/RapidTherma1Annea122激光退火机Excimer1aserAnnea1/E1A23预处理装置Pre-CompactionSystem24返修设备激光化学气相沉积修补机（设备）/配线修正装置/激光化学成膜机1aserCVDRepair/ArrayCVDRepair/1aserCVDRepairEquipment25激光修补机/激光修补机-CF1aserRepair26切割修复机/激光切割修复机/激光修复仪ArrayCutRepair2728阵列研磨修复机化学气相淀积修复机

7、ArraytaperepairArrayCVDRepair2930光刻胶激光修正装置异物研磨装置Photoresist1aserRepairEquipmentGrindingRepairEquipment31成盒曝光设备激光打标机/激光打码机（装置）1aserMarkSystemZ1aserMark32取向膜印刷设备配向膜印刷机（装置）P1Coater33配向膜固化机（装置）/配向膜硬化机/配向膜硬化炉/配向烘烤装置P1MainCure/PIMaincureOve/PIOvenEquipment序号工序设备分类设备名称英文名称（供参考）34蒸发测量仪SteamTester35取向膜传送机P1T

8、ransferM/C36配向膜喷涂机/配向膜列印机/配向膜涂布机P11nkjetPIInkjetPrinter37摩擦设备摩擦设备/配向膜摩擦机/摩擦机RubbingMachineZRubbing38布毛自动检查机/摩擦后自动光学检查机RubbingC1othInspectionZRubbingAOI39紫外光配向设备紫外光配向设备（装置）/配向膜光配向机UV/AZUItravioIet-1ightA1ignmentEquipment/PIPhotoA1ignment40垫料固着设备/隔垫物固化机SpacerCure41自动除泡机/加压脱泡装置AutoC1ave/Autoc1aveEquipm

9、ent42边框胶涂布机（装置）Sea1DispenserEquipment43银胶涂布/银胶涂布机AgDispenser44液晶滴下/液晶滴下机（装置）1CDispenser(Equipment)45对盒机/成盒对位检查机ce11a1igner46成盒及液晶注入设备真空贴合机（装置）VacuumA1igner(Assemb1yEquipment)47本硬化炉/框胶热固化装置/配向膜预烘烤炉/摩擦工艺清洗后烘干炉/配向膜固化机HeatCure/VacuumPressureOven/PIPrecureOven/PIMaincureoven/ARCOVEN/HeatCure/PIPrecure/OD

10、FOvenEquipment48UV硬化/UV硬化机/紫外光固化装置/紫外线固化机/紫外线硬化机UVCure/Sea1UVCureVCureEquipment49枚叶式真空脱气装置S1otTypeDegassing50成盒倒角装置倒角装置/倒角机/磨边机/玻璃边缘研磨机/端子研磨装置EdgeGrinder/AfterCe11CuttingBeve1ing/Pane1EdgeGrindingEquipment51偏光板贴付机（装置）/偏光片高精贴付机Po1AttacherZPoIarizerAttachmentEquipment52装卸机（装置）1D1DROBOT53偏光板粘着设备偏贴开捆/偏贴

11、捆包装置PO1unpacking/packingequipment54偏光板卸料/面取卸料/偏光板卸料装置/装载机Po11oader/UN1OADER/Po11oader55半自动偏光板贴附机（装置）/偏光板贴片机/偏光片贴附机Po1Attacher序号工序设备分类设备名称英文名称（供参考）56偏光板剪切机Po1Cutting57偏光板贴附脱泡机/重工偏光板贴附脱泡机Po1arizerAttachAutoC1ave/ReworkPo1arizerAttachAutoC1ave58偏光板剥离机（装置）/偏光片返修机/偏光板重工装置Po1Repair/Po1arizerAttachmentRewo

12、rkEquipmentZPoIRemoveEquipmentZPREM59激光短路环切割机/快速线切割机1asershortringcutter60修复设备激光修复仪/修复机/激光/黑化/碳化修正装置Ce111aserRepair/Repair/1aser/DM/BMRepairEquipment61保管炉（老化炉）/老化机/烘烤炉装置/老化装置AgingOveOvenAGINGCHARMBERSYSTEM/Mu1tiAgingSystem62电极边维修系统Padrepairsystem63液晶面板成盒修复机/CE11修复机Ce11Repair64液晶脱泡机（装置）1CEvaporator/1

13、CDebubb1er65边框胶脱泡搅拌机/框胶脱泡充填装置/边框胶脱泡机Sea1antEvaporationZSeaIDegasMachine/Sea1MixandChargeEquipment66静电监测系统/静电监测仪StaticMonitoringSys67其它设备离子发生器（风扇型/X射线型）X射线除静电器1onizer(B1owerX-ray)X-RAYIonizer68静电平衡测量仪ESDBa1anceMeasurement69激光焊切机/激光划痕机1asertrimmer70切割机/成型机/玻璃基板切割机/异形切割机/单片切断装置（划片机）Scriber/CE11CuttingS

14、criberZCE11PreCuttingScriber/Specia1CuttingScriber/G1assScribingEquipmentZBreaker71ACF贴付装置ACF输入输出粘贴设备（装置）/异方性导电膜贴附设备（装置）ACFAttacher/ACFattachmentdevice723D光学膜片贴合设备3DFi1m1amination73模块TCP输入输出设备（装置）TCP1oader74TCP压接装置TCP输出压接装置/TCP输出压接设备TCPPre-Bonding75TCP实装及基板压接装置/TCP实装及基板压接设备TCPMain-Bonding序号工序设备分类设备名称英文名称（供参考）76TCP贴装设备/柔性电路板压接装置TCPBonder/O1B&PW