助力科研光学3D表面轮廓仪服务超精密抛光技术发展.docx

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1、助力科研I光学3D表面轮廓仪服务超精密抛光技术发展随着技术的不断进步，精密制造领域对材料表面的处理要求越来越高，超精密抛 光技术作为当下表面处理的尖端技术，对各种高精密产品的生产起到了至关重要 的作用，已广泛应用于集成电路制造、医疗器械、航空航天、3C电子、汽车、 精密模具等多个先进制造行业。SuperView Wl系列光学3D表面轮廓仪通过纳米传动与扫描技术、白光干涉与高 精度3D重建技术实现O. Inm级表面粗糙度测量，成为超精密抛光技术研究领域 的重要工具和帮手。光学3D表面轮廓仪助力科研课题研究，服务超精密抛光技术发展浙江工业大学赵军、吕冰海团队对磨料旋转射流抛光(ARJP)技术，剪切

2、增稠抛光 技术等开展深入研究，并利用SuperViewWl系列光学3D表面轮廓仪对抛光后表 面粗糙度进行检测验证，多篇论文在国际TOP期刊发布。Oribology International (中科院一区)Numerical and experimental investigation on the material removal profile during polishing of inner surfaces using an abrasive rotating jetEISEVIERGnlcnu lists available at t ttTribology Internation

3、aljournal homepage: . Numerical and experimental investigation on the material removal profile during polishing of inner surfaces using an abrasive rotating jetJun Zhao t Jiangyu Ge , Andrci Khudoley , Hongyu Chen , Co9tff of MrrMfcfUMwnity af nv. HaVKtoU 310023. C*M Kq Urwy 4*rg 2jhm 臼SmMr 2 dMwr R

4、weMg TrAmiy Zrw0f), MMury H ErwM ZMsV MHe ltaw 力OaZl ClMa ,Eremi Srry 2aPDry. AV, 3mr la. md Mau Tmftr MsaMe. Nanonal ramy cf SdCnCe of Moha. Mndk 2XO07t Monaand the results of surface roughness were measured by Optical 3D surface profilometer (Super View Wl) that made by Chotest Technology Inc.Wear

5、(中科院一区)Effect of eIastohydrodynamic characteristics on surface roughness in cylindrical shear thickening polishing processContents lists availaMe atWearjournal homepage:.Effect of elastohydrodynamic characteristics on surface roughness in cylindrical shear thickening polishing processWeifeng Yao , B

6、inghai Lyu , , Tianqi Zhang , Luguang Guo . Yuan Song Sdkxrf of MrfiiFIfEraI 2wvr* 6muev UWw*y. Smv, JIMXL ChUte 阳w0m MnMr Omer. Thtjiant UnhvnAy Of MMog. Htngou. 3100H. CMm ScM Of CMISu*Sh9, 312000. CMmJWith a resolution of 0.001 mm that was fixed on a ceramic platform. The surface roughness and it

7、s profile was measured using a white light interferometer (SuperView Wl, CHOTEST)jSurface & Coatings Technology (中科院一区)Surface polishing and modification of Ti-6A1-4V alloy by shear thickening polishingSurfacr & COatin TCChnoIQK) 468 (2023) 129771ELSEVIERContentS IiStS available at, Surface & Coatin

8、gs Technologyjournal hom叩ag。：，v,- m sun 3tXu Wang ,b,Surface polishing and modification of Ti-6A1-4V alloy by shear thickening polishingJiahuan Wang , Yu Zhou jl, Zhen Qiao , Saurav Goel t Jinhu Wang , Hongyu Chen , Julong Yuan b, Binghai Lyu ,l Colltyr Of hkthmcal 5wfV Aqk EElo rrw0ft ,Bm 310023. C

9、tamfc MtFVrwitt0R AfoclMht Cmirrt KQ Lobofwy of SjpnMf Arpmrmf MwvE Atamrcunv Ttdwofft 2V Uniwnty “ Ttthnolafy9310023. 6MGami ArQCtirr acportmmc. TM pfck iotaf ofIMPAuU 310009. CMM4 SchMrf of MXri London South n Untwmityt London Stl M. UKr ZMrmmr of Mfrhameaf EJBnmentf Unhmtty of PrfraUlm andSrlM MndiM 24MO7. IndiaThe 3D surface topography of the Ti-6A1-4V was measured using an optical 3D surface profiler (SuperView Wl, Chotest, China) with a 10 interference objective for an area of 489.5 489.5 m.